Industrial 99.8% Alumina Semiconductor Ceramic Wafer Loader Arm

• Application: Refractory, Structure Ceramic, Industrial Ceramic, Engineering Ceramic
• Type: Ceramic Parts
• Product Name: Ceramic Wafer Arm
• Shaping Methods: ISO Pressed, Dry Pressed
• Density: Over 5.95g/cm3
• Color: Ivory
• Model NO.: Customized
• Secondary Process: CNC Machining, Fine Grinding
• Dimensional Tolerance: Best to Be 0.001mm
• Certificate: RoHS, Reach, ISO9001:2008
• Feature: High Precision, High Mechanical Strength
• Usage: Ceramic Arm for Semiconductor
• Material: Alumina Ceramic
• Transport Package: Individual Packaging
• Specification: Max. OD to be 800mm
• Trademark: JingHui
• Origin: China
• HS Code: 8547100000
• Production Capacity: 50000PCS/Month

Product Description

Industrial 99.8% Alumina Semiconductor Ceramic Wafer Loader Arm 

The main features of the semiconductor ceramic wafer loader arm
1. High precision dimensions with tightening tolerance, it's easier to get a perfect fitting relationshi
2. High-temperature ability: withstand up to 1650°C in oxidizing and reducing atmospheres
3. Wear & abrasion resistance: Alumina is extreme hard technical ceramic with superb wear resistance
4. Chemical inertness, resistant most of the strong acid and alkali, and does not rust forever 
5. Electrical insulation: The insulation breakdown is up to 18KV at least
6. Great mechanical properties, hardness, compressive and flexural strength are much higher stainless steel
7. Chemical corrosion resistance under high temperature, even if with strong acid or alkali
8. Protective atmospheres or high vacuum at high-temperature to eliminate contamination or impurity.
9. Low material cost in high-level applications than other technical ceramics

The specification of ceramic parts

Material option	Alumina(Al2O3), Zirconia (ZrO2), Silicon carbide(SiO2), Silicon nitride(Si3N4)
Forming methods	ISO pressed, Dry pressed, Ceramic injection molding, Hot pressed
Specification	OD can be from 1 to 50mm, length can be from 10mm to 800mm
Precision processing	CNC machining, Precision grinding, Polishing, Lapping,
Tolerance	The tolerance of OD and ID can be 0.001mm,  the tolerance of length can be 0.001mm
Key parameters	Roughness to be 0.02mm, Flatness to be 0.001mm, Parallelism to be 0.001mm
Surface quality	Free of cracks, foreign contamination, mirror surface better than Ra0.1

The description of high precision alumina ceramic wafer loader arm
For semiconductor devices, the critical process, as well as the parts which need to be used in a vacuum, high temperature, and corrosive gas environment, also require a clean and dustless environment. However, precision ceramic material could maintain high stability in a complicated physical and chemical environment. Semiconductor ceramic part we produced with wear resistance, corrosion resistance, low thermal expansion, insulation is made from 99.8% alumina ceramic and formed by cold isostatic pressing, high-temperature sintering, and precision machining, that's why can meet the stringent requirements of parts for semiconductor equipment.


The gallery of high precision ceramic parts





Remark:
We have the capability with a variety of complicated geometry of high precision ceramic parts via CNC machining, precision grinding, precision drilling, and so on.

 

Datasheet of Technical ceramics

Property	Units	Material
		99.5% alumina	99% alumina	95% alumina	ZrO2 (Y-TZP)	ZrO2 (TTZ)
Density	g/cm^3	≥3.85	≥3.80	≥3.60	≥5.95	≥5.72
Water absorption	%	0	0	0	0	0
Hardness	HV	1700	1700	1500	1300	900
Flexural strength	Mpa	≥379	≥338	≥320	≥1200	≥1200
Compressive strength	Mpa	≥2240	≥2240	≥2000	≥1990	1750
Fracture toughness	Mpa m^1/2	4-5	4-5	3-4	6.5-8	11
Max. service temperature	ºC	1675	1600	1450	1000
CTE	1×10 ^-6/ºC	6.5~8.0	6.2~8.0	5.0~8.0	8.0~9.5	10.2
Thermal shock	T(ºC)	≥250	≥200	≥220	≥300	350
Thermal conductivity(25ºC)	W/m.k	30	29	24	3	3
Volume resistivity	ohm.cm
25ºC		>1 x 10^14	>1 x 10^14	>1 x 10^14	>1 x 10^11	>1 x 10^11
300ºC		1 x 10 ^12	8 x 10^11	10^12 -10^13	1 x 10 ^10	1 x 10 ^10
500ºC		5 x 10 ^10	2 x 10^9	1 x 10^9	1 x 10^6	1 x 10^6
Insulation strength	KV/mm	19	18	18	17	20
Dielectric constant(1Mhz)	(E)	9.7	9.5	9.5	29	28

 

Our capability and strength

We have in-housing comprehensive manufacturing types of equipment, including forming, sintering,
CNC machining, precision grinding, laser cutting, and so on, it helps us to control the quality very well.
Also, it greatly benefits cost control.

The state of the art manufacturing equipment






Rigorous Quality-control System




Remark:
We have the complete quality-control system per ISO9001, including IQC, IPQC, QA, and OQC process.


Typical Packaging Proposal and Transportation Methods
1. Packaging proposal


2. Regular Transporation Methods



FAQs (Frequently Asked Questions)
Q1. Are you a factory or trading company?
A: We are a manufacturer of over 15 years of experience. You are welcome to visit our factory.

Q2: Do you send a sample to check?
A: Sure, the sample is free and freight collect.

Q3: When will you ship it?
A: If the products are in storage, we'll ship within 48 hours

Q4: When can I get the price?
A: We regularly quote within 24 hours after we get your inquiry. If you are in urgent need of getting the price.
Please call us or tell us in your email so that we will proceed with your inquiry as a priority.

Q5: Is it available to provide customized products?
A: We always support custom-made demand as per different materials, dimensions, and designs.