Mirror Polished Aluminum Nitride Substrate High Smoothness AlN Ceramic Plate
Mirror polished aluminum nitride (AlN) ceramic plate is a high-performance electronic material with unique physical and chemical properties and is widely used in high-power and high-frequency electronic devices.
Characteristics of AlN Ceramic Plates
1. High thermal conductivity
2. Low coefficient of thermal expansion (CTE)
3. Excellent electrical insulation
4. High mechanical strength and hardness
5. Chemical stability
6. Laser processing compatibility

| AlN Ceramic Plate |
| Item |
Unit |
Value |
| Mechanical Properties |
| Color |
/ |
Gray |
| Density |
g/cm³ |
≥3.33 |
| Flexural Strength |
MPa |
≥380 |
| Water Absorption |
% |
0 |
| Camber |
Length‰ |
≤3‰ |
| Thermal Properties |
| Max. Service Temperature (Non-loading) |
ºC |
>1000 |
CTE (Coefficient of Thermal Expansion) |
20-800ºC, 1×10-6/ºC |
4-6 |
| Thermal Conductivity |
20ºC, W/m·K |
170-230 |
| Electrical Properties |
| Dielectric Constant |
1MHz |
8-10 |
| Volume Resistivity |
20ºC, Ω·cm |
≥1013 |
| Dielectric Strength |
KV/mm |
≥17 |
1. Product Specification
We can make various specifications. The table below shows our standard sizes.
| AlN Ceramic Plate |
| Thickness (mm) |
Maximum Size (mm) |
Shape |
Forming Process |
| As-fired |
Lapped |
Polished |
Rectangular |
Square |
Round |
| 0.1-0.2 |
|
50.8 |
50.8 |
|
√ |
√ |
Tape Casting |
| ≥0.2 |
|
114.3 |
114.3 |
|
√ |
√ |
Tape Casting |
| 0.38 |
140×190 |
140×190 |
120 |
√ |
√ |
|
Tape Casting |
| 0.5 |
140×190 |
140×190 |
120 |
√ |
√ |
|
Tape Casting |
| 0.635 |
140×190 |
200 |
200 |
√ |
√ |
√ |
Tape Casting |
| 1 |
140×190 |
300 |
200 |
√ |
√ |
√ |
Tape Casting |
| 1.5 |
|
300 |
200 |
|
√ |
√ |
Tape Casting |
| 2 |
|
300 |
200 |
|
√ |
√ |
Tape Casting |
| 2.5 |
|
300 |
|
|
√ |
√ |
Tape Casting |
| 3 |
|
300 |
|
|
√ |
√ |
Tape Casting |
| … |
|
450 |
|
|
√ |
√ |
Isostatic Pressing |
| 10 |
|
450 |
|
|
√ |
√ |
Isostatic Pressing |
| Other special thicknesses within the thickness range of 0.1-3.0mm can be achieved by lapping. |
2. Product Tolerances
| AlN Ceramic Plate |
| Item |
Substrate Thickness (mm) |
Standard Tolerance (mm)
|
Best Tolerance (mm)
|
Laser Cutting Tolerance (mm) |
| Length and Width Tolerance |
/ |
±2 |
|
±0.15 |
| Thickness Tolerance |
T<1.0 |
±0.03 |
±0.01 |
|
| 1.0≤T<1.5 |
±0.05 |
±0.01 |
|
| T≥1.5 |
±0.07 |
±0.01 |
|
3. Surface Roughness
| AlN Ceramic Plate |
| Material |
Surface Roughness (μm) |
| As Fired |
Lapped |
Polished |
| AIN |
Ra 0.4 |
Ra 0.3-0.7 |
Ra ≤0.05 |
4. Laser Processing
(1) Hole Size
| AlN Ceramic Plate |
| Hole Diameter (mm) |
Standard Tolerance (mm) |
| φ≤0.5 |
0.08 |
| φ>0.5 |
0.2 |
(2) Laser Scribing
| AlN Ceramic Plate |
| Substrate Thickness (mm) |
the Percentage of Laser Scribe Line Depth to Thickness (%) |
| 0.2-0.3 |
40%±5% |
| 0.5<T≤1.0 |
50%±3% |
| 1.0<T≤1.2 |
55%±3% |
| 1.2<T≤1.5 |
60%±3% |
| 2.0 |
45% (Extreme Depth) |
| The scribing spot can be in different sizes. Generally there are small spot 0.03-0.04mm (Substrate Thickness≤0.5mm ) and large spot 0.08-0.1mm (Substrate Thickness>0.5mm), and the accuracy is ±0.01mm. |
Because ceramics are hard and brittle materials, each of our products will be packed in a safe and reliable way to avoid damage during transportation.
