Polished YSZ ZrO2 Zirconium Oxide Substrate Zirconia Ceramic Plate for Semiconductor
Mirror-polished zirconia ceramic plates are high-end, high-value-added advanced ceramic materials. They primarily serve cutting-edge industries and high-tech R&D fields such as semiconductors, optoelectronics, lasers, and new energy. They are a key foundational material for achieving high precision, high reliability, and high performance in these fields.
Their core value lies in their perfect balance of mechanical strength, thermal performance, and chemical stability, while achieving irreplaceable surface properties through mirror polishing.
Mirror polished zirconia ceramic plate combines the excellent properties of zirconia material itself and the surface characteristics of mirror polishing. The main features are as follows:
1. Extremely High Mechanical Strength and Toughness
Zirconia has high toughness (crack resistance), even comparable to some metals. This means it is more resistant to drops and impacts, and less likely to break.
2. Excellent Thermal Properties
Zirconia is an excellent thermal insulator with a low thermal conductivity (approximately 2-3 W/m·K), making it ideal as a heat-insulating substrate.
3. Excellent Chemical Stability
Zirconia is corrosion-resistant and chemically inert. Its surface is non-reactive with other substances, resulting in a long service life.
4. Unique Surface Properties (A Core Advantage of Mirror Polishing)
The surface is as smooth as a mirror, with high reflectivity and extremely low light scattering. Its extremely low porosity effectively prevents the penetration and adsorption of gases and liquids, maintaining cleanliness. The high flatness achieved through precision polishing meets the requirements of high-precision applications.
5. Excellent Electrical Properties
Zirconia is an excellent electrical insulator with reliable insulation properties. Its low dielectric constant and low dielectric loss make it suitable for high-frequency circuits.
Material Properties of Zirconia Ceramic Plates
| Zirconia Ceramic Plate |
| Item |
Unit |
ZrO2 |
| Mechanical Properties |
| Color |
/ |
White |
| Density |
g/cm3 |
≥6 |
| Water Absorption |
% |
0 |
| Vickers Hardness (Load 4.9N) |
Gpa |
11 |
| Young's Modulus |
GPa |
200 |
| Flexural Strength |
Mpa |
>800 |
| Fracture Toughness |
MPa·m1/2 |
5.0 |
| Thermal Properties |
| Max. Service Temperature (Non-loading) |
ºC |
1000 |
| CTE (Coefficient of Thermal Expansion) (20-800ºC) |
1×10-6/ºC |
7.8 |
| Thermal Shock Resistance |
≥10 Times |
No Crack |
| Thermal Conductivity (25ºC) |
W/m·K |
>3 |
| Specific Heat (25ºC) |
J/kg·K |
460 |
| Electrical Properties |
| Volume Resistivity (25ºC) |
Ω·cm |
≥1013 |
| Dielectric Strength |
KV/mm |
≥10 |
| Dielectric Constant (25ºC, 1MHz ) |
(E) |
33 |
| Dielectric Loss Angle (25ºC, 1MHz ) |
×10-4 |
≤16 |
We have been making ceramic substrates for more than 15 years. We can meet your customized needs, and our products have high dimensional accuracy and excellent performance. Please feel free to contact us.
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