High Precision Fast Speed Laser Scribing Al2O3 Alumina Ceramic Substrat
Advantages of Laser Scribing
Due to the special properties of ceramic substrate materials, they generally cannot be processed by traditional processing techniques, and laser is an ideal tool for processing such materials.
Laser scribing has high precision, fast speed, no scratch on the workpiece and no mechanical deformation, and can process any graphics.
Alumina Ceramic Substrate |
Item |
Unit |
96% Al2O3 |
99.6% Al2O3 |
Mechanical Properties |
Color |
/ |
/ |
White |
Ivory |
Density |
Drainage Method |
g/cm3 |
≥3.70 |
≥3.95 |
Light Reflectivity |
400nm/1mm |
% |
94 |
83 |
Flexural Strength |
Three Point Bending |
MPa |
>350 |
>500 |
Fracture Toughness |
Indentation Method |
MPa·m1/2 |
3.0 |
3.0 |
Vickers Hardness |
Load 4.9N |
GPa |
14 |
16 |
Young's Modulus |
Stretching Method |
GPa |
340 |
300 |
Water Absorption |
|
% |
0 |
0 |
Camber |
/ |
Length‰ |
T≤0.3: ≤5‰, Others: ≤3‰ |
≤3‰ |
Thermal Properties |
Max. Service Temperature (Non-loading) |
/ |
ºC |
1200 |
1400 |
CTE (Coefficient of Thermal Expansion) |
20-800ºC |
1×10-6/ºC |
7.8 |
7.9 |
Thermal Conductivity |
25ºC |
W/m·K |
>24 |
>29 |
Thermal Shock Resistance |
800ºC |
≥10 Times |
No Crack |
No Crack |
Specific Heat |
25ºC |
J/kg·k |
750 |
780 |
Electrical Properties |
Dielectric Constant |
25ºC, 1MHz |
/ |
9.4 |
9.8 |
Dielectric Loss Angle |
25ºC, 1MHz |
×10-4 |
≤3 |
≤2 |
Volume Resistivity |
25ºC |
Ω·cm |
≥1014 |
≥1014 |
Dielectric Strength |
DC |
KV/mm |
≥15 |
≥15 |
1. Laser Processing
(1) Hole Size
Alumina Ceramic Substrate |
Hole Diameter (mm) |
Standard Tolerance (mm) |
φ≤0.5 |
0.08 |
φ>0.5 |
0.2 |
(2) Laser Scribing
Alumina Ceramic Substrate |
Substrate Thickness (mm) |
the Percentage of Laser Scribe Line Depth to Thickness (%) |
0.2-0.3 |
40%±5% |
0.3<T≤0.5 |
50%±3% |
0.5<T≤1.0 |
43%±3% |
1.2 |
55%±3% |
1.5 |
55%±3% |
2.0 |
55%+10% |
The scribing spot can be in different sizes. Generally there are small spot 0.03-0.04mm (Substrate Thickness≤0.5mm ) and large spot 0.08-0.1mm (Substrate Thickness>0.5mm), and the accuracy is ±0.01mm. |
2. Product Specification
Products of various specifications can be produced. The table below shows our standard thicknesses and sizes.
Alumina Ceramic Substrate |
99.6% Al2O3 |
Thickness (mm) |
Maximum Size (mm) |
Shape |
Molding Technique |
As Fired |
Lapped |
Polished |
Rectangular |
Square |
Round |
0.1-0.2 |
|
50.8 |
50.8 |
|
√ |
√ |
Tape Casting |
0.25 |
|
114.3 |
114.3 |
|
√ |
|
Tape Casting |
0.38 |
120 |
114.3 |
114.3 |
|
√ |
|
Tape Casting |
0.5 |
120 |
114.3 |
114.3 |
|
√ |
|
Tape Casting |
0.635 |
120 |
114.3 |
114.3 |
|
√ |
|
Tape Casting |
Other special thicknesses within the thickness range of 0.1-0.635mm can be achieved by lapping. |
96% Al2O3 |
Thickness (mm) |
Maximum Size (mm) |
Shape |
Molding Technique |
As Fired |
Lapped |
Polished |
Rectangular |
Square |
Round |
0.25 |
120 |
114.3 |
114.3 |
|
√ |
|
Tape Casting |
0.3 |
120 |
114.3 |
114.3 |
|
√ |
|
Tape Casting |
0.38 |
140×190 |
|
|
√ |
|
|
Tape Casting |
0.5 |
140×190 |
|
|
√ |
|
|
Tape Casting |
0.635 |
140×190 |
|
|
√ |
|
|
Tape Casting |
0.76 |
130×140 |
|
|
√ |
|
|
Tape Casting |
0.8 |
130×140 |
|
|
√ |
|
|
Tape Casting |
0.89 |
130×140 |
|
|
√ |
|
|
Tape Casting |
1 |
280×240 |
|
|
√ |
|
|
Tape Casting |
1.5 |
165×210 |
|
|
√ |
|
|
Tape Casting |
2 |
500×500 |
|
|
√ |
|
|
Tape Casting |
Other special thicknesses within the thickness range of 0.1-2.0mm can be achieved by lapping. |
3. Product Tolerances
Alumina Ceramic Substrate |
Item |
Substrate Thickness (mm) |
Standard Tolerance (mm) |
Best Tolerance (mm) |
Laser Cutting Tolerance (mm) |
Length and Width Tolerance |
/ |
±2 |
|
±0.15 |
Thickness Tolerance |
T<0.3 |
±0.03 |
±0.01 |
|
0.30-1.0 |
±0.05 |
±0.01 |
|
T>1.0 |
±10% |
±0.01 |
|
4. Surface Roughness
Alumina Ceramic Substrate |
Material |
Surface Roughness (μm) |
As Fired |
Lapped |
Polished |
96% Al2O3 |
Ra 0.2-0.75 |
Ra 0.3-0.7 |
Ra ≤0.05 |
99.6% Al2O3 |
Ra 0.05-0.15 |
Ra 0.1-0.5 |
Ra ≤0.05 |